Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Manylion Llyfryddiaeth
Prif Awdur: Venezuela, Jeffrey De Guzman
Fformat: Traethawd Ymchwil
Iaith:English
Cyhoeddwyd: 2003.
Pynciau:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.