Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Podrobná bibliografie
Hlavní autor: Venezuela, Jeffrey De Guzman
Médium: Diplomová práce
Jazyk:English
Vydáno: 2003.
Témata:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.