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Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografski detalji
Glavni autor: Venezuela, Jeffrey De Guzman
Format: Disertacija
Jezik:engleski
Izdano: 2003.
Teme:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.