APA (7th ed.) Citation

Valmoria, N. B. (2000). Thin-film deposition of zirconium nitride (ZrN) via the plasma sputter-type multicusp ion source.

Chicago Style (17th ed.) Citation

Valmoria, Nicomedes Baz. Thin-film Deposition of Zirconium Nitride (ZrN) via the Plasma Sputter-type Multicusp Ion Source. 2000.

MLA (9th ed.) Citation

Valmoria, Nicomedes Baz. Thin-film Deposition of Zirconium Nitride (ZrN) via the Plasma Sputter-type Multicusp Ion Source. 2000.

Warning: These citations may not always be 100% accurate.