Rapid thermal processing of semiconductors

Rapid thermal processing of semiconductors

Bibliografske podrobnosti
Glavni avtor: Borisenko, V. E. (Viktor Evgen'evich)
Drugi avtorji: Hesketh, P. J. (Peter J.)
Format: Knjiga
Jezik:English
Izdano: New York Plenum Press c1997.
Teme:
Rapid thermal processing.
Semiconductors > Design and construction.