APA (7th ed.) Citation

Borisenko, V. E., & Hesketh, P. J. (1997). Rapid thermal processing of semiconductors. Plenum Press.

Chicago Style (17th ed.) Citation

Borisenko, V. E., and P. J. Hesketh. Rapid Thermal Processing of Semiconductors. New York: Plenum Press, 1997.

MLA (9th ed.) Citation

Borisenko, V. E., and P. J. Hesketh. Rapid Thermal Processing of Semiconductors. Plenum Press, 1997.