APA (7th ed.) Citation

Runyan, W. R., & Bean, K. (1990). Semiconductor integrated circuit processing technology. Addison-Wesley.

Chicago Style (17th ed.) Citation

Runyan, W. R., and K.E Bean. Semiconductor Integrated Circuit Processing Technology. Reading, Mass: Addison-Wesley, 1990.

MLA (9th ed.) Citation

Runyan, W. R., and K.E Bean. Semiconductor Integrated Circuit Processing Technology. Addison-Wesley, 1990.