Schuegraf, K. (1988). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. Noyes Publications.
Chicago Style (17th ed.) CitationSchuegraf, Klaus. Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Westwood, N.J: Noyes Publications, 1988.
MLA (9th ed.) CitationSchuegraf, Klaus. Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Noyes Publications, 1988.
Warning: These citations may not always be 100% accurate.