Kern, W. (1993). Handbook of semiconductor wafer cleaning technology: Science, technology, and applications. Noyes Publications.
Citazione stile Chigago Style (17a edizione)Kern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Park Ridge, N.J., U.S.A: Noyes Publications, 1993.
Citatione MLA (9a ed.)Kern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Noyes Publications, 1993.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.