Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

书目详细资料
主要作者: Wasa, Kiyotaka
其他作者: Hayakawa, Shigeru 1925-
格式: 图书
语言:English
出版: Park Ridge, N.J. Noyes Publications c1992.
主题:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.