Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

Bibliografiska uppgifter
Huvudupphovsman: Wasa, Kiyotaka
Övriga upphovsmän: Hayakawa, Shigeru 1925-
Materialtyp: Bok
Språk:English
Publicerad: Park Ridge, N.J. Noyes Publications c1992.
Ämnen:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.