Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

Bibliografske podrobnosti
Glavni avtor: Wasa, Kiyotaka
Drugi avtorji: Hayakawa, Shigeru 1925-
Format: Knjiga
Jezik:English
Izdano: Park Ridge, N.J. Noyes Publications c1992.
Teme:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.