Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

書目詳細資料
主要作者: Wasa, Kiyotaka
其他作者: Hayakawa, Shigeru 1925-
格式: 圖書
語言:English
出版: Park Ridge, N.J. Noyes Publications c1992.
主題:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.