Handbook of sputter deposition technology principles, technology, and applications

Detaylı Bibliyografya
Yazar:	Wasa, Kiyotaka
Diğer Yazarlar:	Hayakawa, Shigeru 1925-
Materyal Türü:	Kitap
Dil:	English
Baskı/Yayın Bilgisi:	Park Ridge, N.J. Noyes Publications c1992.
Konular:	Cathode sputtering (Plating process) > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc.