APA (7th ed.) Citation

Wasa, K., & Hayakawa, S. (1992). Handbook of sputter deposition technology: Principles, technology, and applications. Noyes Publications.

Chicago Style (17th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology, and Applications. Park Ridge, N.J: Noyes Publications, 1992.

MLA (9th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology, and Applications. Noyes Publications, 1992.