APA (7th ed.) Citation

O'Mara, W. C., Herring, R. B., & Hunt, L. P. (1990). Handbook of semiconductor silicon technology. Noyes Publications.

Chicago Style (17th ed.) Citation

O'Mara, William C., Robert B. Herring, and Lee Philip Hunt. Handbook of Semiconductor Silicon Technology. Park Ridge, N.J., U.S.A: Noyes Publications, 1990.

MLA (9th ed.) Citation

O'Mara, William C., et al. Handbook of Semiconductor Silicon Technology. Noyes Publications, 1990.