Cita APA (7th ed.)

Sivaram, S. (1995). Chemical vapor deposition: Thermal and plasma deposition of electronic materials. Van Nostrand Reinhold.

Cita Chicago (17th ed.)

Sivaram, S. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. N.Y: Van Nostrand Reinhold, 1995.

Cita MLA (9th ed.)

Sivaram, S. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. Van Nostrand Reinhold, 1995.