Chemical vapor deposition for microelectronics principles, technology, and applications
| Autor principal: | |
|---|---|
| Format: | Llibre |
| Idioma: | English |
| Publicat: |
Park Ridge, N.J.
Noyes
c1987.
|
| Matèries: |
| Autor principal: | |
|---|---|
| Format: | Llibre |
| Idioma: | English |
| Publicat: |
Park Ridge, N.J.
Noyes
c1987.
|
| Matèries: |