Chemical vapor deposition for microelectronics principles, technology, and applications

Xehetasun bibliografikoak
Egile nagusia:	Sherman, Arthur
Formatua:	Liburua
Hizkuntza:	English
Argitaratua:	Park Ridge, N.J. Noyes c1987.
Gaiak:	Vapor-plating. Integrated circuits > Design and construction.