Sherman, A. (1987). Chemical vapor deposition for microelectronics: Principles, technology, and applications. Noyes.
芝加哥风格引文Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Park Ridge, N.J: Noyes, 1987.
MLA引文Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Noyes, 1987.
警告：这些引文格式不一定是100％准确.