APA aipamena

Sherman, A. (1987). Chemical vapor deposition for microelectronics: Principles, technology, and applications. Noyes.

Chicago Style aipamena

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Park Ridge, N.J: Noyes, 1987.

MLA aipamena

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Noyes, 1987.