APA (7th ed.) Citation

Ohmi, T. (1993). Ultraclean technology handbook. Marcel Dekker.

Chicago Style (17th ed.) Citation

Ohmi, Tadahiro. Ultraclean Technology Handbook. New York: Marcel Dekker, 1993.

MLA (9th ed.) Citation

Ohmi, Tadahiro. Ultraclean Technology Handbook. Marcel Dekker, 1993.

Warning: These citations may not always be 100% accurate.