Ohmi, T. (1993). Ultraclean technology handbook. Marcel Dekker.
Cita Chicago (17th ed.)Ohmi, Tadahiro. Ultraclean Technology Handbook. New York: Marcel Dekker, 1993.
Cita MLA (9th ed.)Ohmi, Tadahiro. Ultraclean Technology Handbook. Marcel Dekker, 1993.
Atenció: Aquestes cites poden no estar 100% correctes.