APA (7th ed.) Citation

Kagaku Kmogaku Kymokai (Japan) & Naka, Y. (1993). Introduction to VLSI process engineering. Chapman & Hall.

Chicago Style (17th ed.) Citation

Kagaku Kmogaku Kymokai (Japan) and Yuji Naka. Introduction to VLSI Process Engineering. London: Chapman & Hall, 1993.

MLA (9th ed.) Citation

Kagaku Kmogaku Kymokai (Japan) and Yuji Naka. Introduction to VLSI Process Engineering. Chapman & Hall, 1993.