APA (7th ed.) Citation

Glocker, D. A., & Shah, S. I. (1995). Handbook of thin film process technology. Institute of Physics Pub.

Chicago Style (17th ed.) Citation

Glocker, David A., and S. Ismat Shah. Handbook of Thin Film Process Technology. Bristol, UK: Institute of Physics Pub, 1995.

MLA (9th ed.) Citation

Glocker, David A., and S. Ismat Shah. Handbook of Thin Film Process Technology. Institute of Physics Pub, 1995.