Moreau, W. M. (1988). Semiconductor lithography: Principles, practices, and materials. Plenum Press.
Chicago Style (17th ed.) CitationMoreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. New York: Plenum Press, 1988.
MLA (9th ed.) CitationMoreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. Plenum Press, 1988.
Warning: These citations may not always be 100% accurate.