Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Bibliografiska uppgifter
Institutionell upphovsman: Microcircuit Engineering 91
Materialtyp: Bok
Språk:English
Publicerad: Amsterdam Elsevier 1992.
Ämnen:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Microlithography > Congresses.