Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Bibliografische gegevens
Coauteur: Microcircuit Engineering 91
Formaat: Boek
Taal:English
Gepubliceerd in: Amsterdam Elsevier 1992.
Onderwerpen:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Microlithography > Congresses.