Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Bibliographische Detailangaben
Körperschaft: Microcircuit Engineering 91
Format: Buch
Sprache:English
Veröffentlicht: Amsterdam Elsevier 1992.
Schlagworte:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Microlithography > Congresses.