APA (7th ed.) Citation

Microcircuit Engineering 91. (1992). Microcircuit Engineering 91: Proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy. Elsevier.

Chicago Style (17th ed.) Citation

Microcircuit Engineering 91. Microcircuit Engineering 91: Proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy. Amsterdam: Elsevier, 1992.

MLA (9th ed.) Citation

Microcircuit Engineering 91. Microcircuit Engineering 91: Proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy. Elsevier, 1992.

Warning: These citations may not always be 100% accurate.