MEMS & microsystems design and manufacture

MEMS & microsystems design and manufacture

Xehetasun bibliografikoak
Egile nagusia: Hsu, Tai-Ran
Formatua: Liburua
Hizkuntza:English
Argitaratua: Boston McGraw-Hill c2002.
Gaiak:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.