APA (7th ed.) Citation

Hsu, T. (2002). MEMS & microsystems: Design and manufacture. McGraw-Hill.

Chicago Style (17th ed.) Citation

Hsu, Tai-Ran. MEMS & Microsystems: Design and Manufacture. Boston: McGraw-Hill, 2002.

MLA (9th ed.) Citation

Hsu, Tai-Ran. MEMS & Microsystems: Design and Manufacture. McGraw-Hill, 2002.

Warning: These citations may not always be 100% accurate.