Handbook of microlithography, micromachining, and microfabrication - Rai-Choudhury, P. (Bellingham, Wash. SPIE Optical Engineering Press, 1997)
v. 1. Microlithography--v. 2.Micromachining and microfabrication.
Keywords: Microlithography; Micromachining; Microfabrication