Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press.
Chicago-referens (17:e uppl.)Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash: SPIE Optical Engineering Press, 1997.
MLA-referens (9:e uppl.)Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press, 1997.
Varning: dessa hänvisningar är inte alltid fullständigt riktiga.