Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press.
Chicagoスタイル(17版)引用形式Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash: SPIE Optical Engineering Press, 1997.
MLA(9版)引用形式Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press, 1997.
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