Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press.
Citazione stile Chigago Style (17a edizione)Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash: SPIE Optical Engineering Press, 1997.
Citatione MLA (9a ed.)Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press, 1997.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.