APA (7th ed.) Citation

Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.

Chicago Style (17th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.

MLA (9th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.