Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw-Hill.
Lua i Stíl Chicago (17ú heag.)Middleman, Stanley, agus Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw-Hill, 1993.
Lua MLA (9ú heag.)Middleman, Stanley, agus Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw-Hill, 1993.
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