Chemical vapour deposition of tungsten from WF6/SiH4 and WF8/GeH4

Chemical vapour deposition of tungsten from WF6/SiH4 and WF8/GeH4

Bibliographic Details
Main Author: Van der Jeugd, Cornelius Alexander
Format: Book
Language:English
Published: [Netherlands Delft University] 1992.
Subjects:
Vapor-plating.