Introduction to microelectronic fabrication Richard C. Jaeger.

Introduction to microelectronic fabrication Richard C. Jaeger.

Bibliographic Details
Main Author: Jaeger, Richard C.
Format: Book
Published: Reading, Mass. Addison-Wesley c1988.
Series:Modular series on solid state devices v. 5
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.