APA (7th ed.) Citation

Plummer, J. D., & Griffin, P. B. (2023). Integrated circuit fabrication: Science and technology. Cambridge University Press. https://doi.org/10.1017/9781009303606

Chicago Style (17th ed.) Citation

Plummer, James D., and Peter B. Griffin. Integrated Circuit Fabrication: Science and Technology. New York: Cambridge University Press, 2023. https://doi.org/10.1017/9781009303606.

MLA (9th ed.) Citation

Plummer, James D., and Peter B. Griffin. Integrated Circuit Fabrication: Science and Technology. Cambridge University Press, 2023. https://doi.org/10.1017/9781009303606.