Growth of Al-doped ZnO films via magnetron sputtering using pressed-sintered power targets

Growth of Al-doped ZnO films via magnetron sputtering using pressed-sintered power targets

Bibliographic Details
Main Author: Madera, Rozen Grace B. (Author)
Other Authors: Vasquez, Magdaleno Jr. R. (adviser.), Yamaguchi, Tomohiro (adviser.)
Format: Thesis
Language:English
Published: Quezon City College of Engineering, University of the Philippines Diliman 2023.
Subjects:
Zinc oxide.
Magnetron sputtering.
Indium tin oxide.
Online Access:Abstract