Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

Bibliographic Details
Main Author: Ilasin, Mark D. (Author)
Other Authors: Vasquez, Magdaleno Jr. R. (adviser.)
Format: Thesis
Language:English
Published: Quezon City College of Engineering, University of the Philippines Diliman 2023.
Subjects:
Thin films.
Silicon nitride.
Carbon.
Online Access:Abstract