Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

書目詳細資料
主要作者: Ilasin, Mark D. (Author)
其他作者: Vasquez, Magdaleno Jr. R. (adviser.)
格式: Thesis
語言:English
出版: Quezon City College of Engineering, University of the Philippines Diliman 2023.
主題:
Thin films.
Silicon nitride.
Carbon.
在線閱讀:Abstract