Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride

Dettagli Bibliografici
Autore principale: Ilasin, Mark D. (Autore)
Altri autori: Vasquez, Magdaleno Jr. R. (adviser.)
Natura: Tesi
Lingua:English
Pubblicazione: Quezon City College of Engineering, University of the Philippines Diliman 2023.
Soggetti:
Thin films.
Silicon nitride.
Carbon.
Accesso online:Abstract