Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source

Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source

Bibliographic Details
Main Authors: Malapit, Giovanni M. (Author), Mahinay, Christian Lorenz S. (Author), Poral, Matthew D. (Author), Ramos, Henry J. (Author)
Format: Analytics
Language:English
Published: 2012.
Online Access:http://dx.doi.org/10.1063/1.3665966