Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source

Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source

Detalhes bibliográficos
Main Authors: Malapit, Giovanni M. (Author), Mahinay, Christian Lorenz S. (Author), Poral, Matthew D. (Author), Ramos, Henry J. (Author)
Formato: Analytics
Idioma:English
Publicado em: 2012.
Acesso em linha:http://dx.doi.org/10.1063/1.3665966