Handbook of microelectromechanical systems
This is an all-inclusive book on microelectromechanical systems (MEMS). The developments of MEMS and devices have been influential in the demonstration of new devices and techniques, and even in the influx of new fields of research and developments such as BioMEMS, actuators, microfluidic devices, R...
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| Format: | Book |
| Language: | English |
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New York, NY, USA
NY Research Press
[2015]
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