00000cam a22000003i 4500 UP-1685594773862075067 Buklod 20170301092221.0 g||| | || || ta 170704s2015 nyua rb |||| u|eng d 9781632382542 (hbk.) (iLib)UPBAG-00023453608 BC-67803 JNJ Educational Enterprises Php6,469.00 DPS Faculty BAG rda eng TK 7875 H36 2015 Handbook of microelectromechanical systems edited by Eve Versuh. New York, NY, USA NY Research Press [2015] vi, 294 pages illustrations (some color) 24 cm text rdacontent unmediated rdamedia volume rdacarrier Includes bibliographical references. This is an all-inclusive book on microelectromechanical systems (MEMS). The developments of MEMS and devices have been influential in the demonstration of new devices and techniques, and even in the influx of new fields of research and developments such as BioMEMS, actuators, microfluidic devices, RF and optical MEMS. Therefore, the need is for MEMS book which incorporates the recent advances in the field. This book is prepared by the specialists in the field of MEMS. It consists of two major sections dedicated to RF and Optical MEMS, and MEMS based Actuators. Microelectromechanical systems Research. Mechatronics Research. Versuh, Eve editor. FO UPBAG UPBAG-MAIN TK 7875 H36 2015 Book