Thermal stability study on titanium disilicide (tisi2) thin films with titanium nitride (tin) capping using atomic force microscopy
| Udgivet i: | Philippine Engineering Journal Vol. 23, no. 2 (2002), 49-62 |
|---|---|
| Hovedforfatter: | |
| Andre forfattere: | |
| Format: | Article |
| Sprog: | English |
| Udgivet: |
2002
|
| Fag: |